| Developer | DPD-100 | DPD-200 |
| TMAH (%) | 2.15±0.1 | 2.38±0.1 |
| Normality (N) | 0.237±0.01 | 0.26±0.01 |
| Surfactant | with | without |
DPD Series is TMAH(tetramethylammonium hydroxide) aqueous solution.
Metal ion free
Scum free after development
Colorless, odorless, inorganic alkaline aqueous solution.
Little dependence on exposure energy and temperature of developer.
Very low contamination level (Metal-ion & particles)
| Developer | DPD-100 | DPD-200 |
| TMAH (%) | 2.15±0.1 | 2.38±0.1 |
| Normality (N) | 0.237±0.01 | 0.26±0.01 |
| Surfactant | with | without |
DPD Series is TMAH(tetramethylammonium hydroxide) aqueous solution.
Metal ion free
Scum free after development
Colorless, odorless, inorganic alkaline aqueous solution.
Little dependence on exposure energy and temperature of developer.
Very low contamination level (Metal-ion & particles)
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